| NCID | AA10635106 |
| タイトル | Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
| 巻次(年月次) | Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990) |
| 出版者 | New York : American Institute of Physics , 1983-1990 |
| 形態 | 8 v. : ill. ; 29 cm |
| 別誌名 | J. vac. sci. technol., B, Microelectronics process. phenom
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Microelectronics processing and phenomena
|
| 注記 | Title from cover
Issued also on microfilm |
| ISSN | 0734211X |
| 和洋区分 | 洋 |
| 刊行頻度 | 隔月刊 |
| 本文言語 | 英語 |
| 標題言語 | 英語 |
| 出版国 | アメリカ合衆国 |
| 番号 | LCCN : 83642371
CODEN : JVTBD9
|
| 継続前誌名 | Journal of vacuum science and technology / American Vacuum Society <AA00708677>
|
| 継続後誌名 | Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena <AA10804928>
|
| 雑誌変遷マップID | 30085200 |